
Two-color detector
Two-Color Detectors for Precise Temperature Measurement in Wafer Processing
If you’ve spent any time on a fab floor managing Rapid Thermal Processing (RTP) or CVD, you know the nightmare of “drifting” temperatures. You dial

If you’ve spent any time on a fab floor managing Rapid Thermal Processing (RTP) or CVD, you know the nightmare of “drifting” temperatures. You dial