If you have ever wrestled with a high-speed laser marking head drifting off-target by 200 microradians halfway through an eight-hour shift, you already know the culprit. It is almost never the digital coordinate generator or the laser source itself. The headache lives directly inside the analog-to-digital sensor chain and the servo driver circuitry.

Building a rock-solid galvanometer scanner closed loop feedback circuit means turning microamps of optical current into sub-microradian positional accuracy under brutal mechanical acceleration. Galvo rotors whip back and forth at 2 kHz to 5 kHz, generating back-EMF, thermal spikes, and high-frequency noise that loves nothing more than corrupting your sensor traces.

When we evaluate a modern galvanometer scanner closed loop feedback architecture, we are looking at an integrated physical and digital signal chain:

The Galvanometer Feedback Signal Chain:
1. Optical Source & Modulation: Infrared LED or VCSEL emitting stable optical flux across an internal rotor paddle.
2. Optical Transduction: Balanced Silicon PIN photodiodes capturing differential light flux proportional to angular rotor position.
3. Analog Front-End (TIA): Low-noise transimpedance amplifiers converting nanoamps and microamps into high-level voltage signals.
4. Normalization Stage: Sum-and-difference ratiometric division circuit to eliminate emitter intensity fluctuations and thermal drift.
5. Signal Acquisition: High-speed, zero-latency Successive Approximation Register (SAR) ADC conversion.
6. Digital Servo Processing: DSP or FPGA running high-rate discrete PID calculation, velocity/acceleration feedforward, and mechanical resonance notch filtering.
7. Current Output Stage: Transconductance power amplifier driving the galvo rotor voice coil with controlled torque.

Let’s walk through the entire physical feedback loop step by step: from the physical silicon photodiode receiving optical flux behind the moving vane, through transimpedance amplification, error conditioning, ADC quantization, and down to the PID and notch filter algorithms running on your digital signal processor.


The Physics of the Optical Position Detector (PD Inside the Galvo)

Inside an optical closed-loop galvanometer scanner, angular position is measured using an optical blocking vane attached directly to the rear of the rotor shaft. An infrared emitter (LED or VCSEL) shines light across this vane onto a balanced pair of Silicon PIN photodiodes or a segmented quadrant detector.

As the rotor turns, the vane selectively shadows one photodiode while exposing more active area on the other. This mechanical differential shuttering creates two complementary photocurrents, Ia and Ib.

Key Rule of Galvo Optical Sensors: Never rely on absolute single-ended photodiode current. Any fluctuation in emitter output due to temperature will register as false mechanical displacement. You must always use a differential, ratiometric measurement scheme:
Position Output = (Ia – Ib) / (Ia + Ib)

By dividing the differential photocurrent (Ia – Ib) by the total photocurrent (Ia + Ib), the galvanometer scanner closed loop feedback mathematically cancels out LED aging, emitter drive ripple, and ambient thermal drift.


Front-End Sensor Selection: Silicon PIN Photodiodes for Galvo Systems

Your choice of front-end photodetector dictates the noise floor, bandwidth, and long-term thermal stability of the entire galvanometer scanner closed loop feedback loop.

For high-speed laser scan heads, you need PIN photodiodes characterized by low junction capacitance (Cj < 15 pF at reverse bias), ultra-low dark current (Id < 1 nA at 25°C), and matched spectral responsivity in the near-infrared band (typically 850 nm to 940 nm).

ParameterBeePhoton PDC-C2928-NIR-BBeePhoton PDC-C2929BeePhoton PDC-2C3432-NIR-B
Detector ArchitectureSingle PIN DieHigh-Speed PIN DieDual-Segment Dual PIN Die
Peak Responsivity940 nm920 nm940 nm
Junction Capacitance (Cj)8.5 pF @ 5V6.2 pF @ 5V12.0 pF per element @ 5V
Dark Current (Id)0.25 nA @ -5V0.18 nA @ -5V0.50 nA @ -5V
Rise Time (tr)4.5 ns3.2 ns6.0 ns
Active Area GeometryMatched Single PadUltra-Compact PadMonolithic Dual Strip
Primary Galvo RoleCompact Scan HeadsUltra-High Speed ScannersBalanced Differential Feedback

When designing high-bandwidth feedback loops, we frequently utilize matched sensor dies. For classic balanced paddle architectures, the PDC-2C3432-NIR-B segmented PIN photodiode chip provides near-identical thermal tracking across both channels because both active areas share the exact same monolithic silicon substrate.

If your design demands independent physical placement on opposite sides of a cylindrical rotor shaft, utilizing discrete, low-capacitance chips like the PDC-C2928-NIR-B 940nm photodiode or the ultra-low dark current PDC-C2929 920nm silicon PIN photodiode allows precision mechanical alignment while keeping front-end capacitance low enough to preserve phase margin in your galvanometer scanner closed loop feedback.

Si PIN photodiodes for Galvo PDC-C2929

The PDC-C2929 is a budget-friendly 920nm silicon PIN photodiode chip. This 920nm silicon PIN photodiode offers stable, cost-effective scanner position tracking.


Front-End TIA Design: Turning Microamps into Stable Voltage

The transimpedance amplifier (TIA) converts the photodiode current (typically 10 uA to 500 uA full-scale) into a usable analog voltage. In a galvanometer scanner closed loop feedback circuit, this stage is where phase margin goes to die if layout parasitics and capacitance compensation are neglected.

Operational Amplifier TIA Topology:

  • Photodiode anode/cathode connects directly to the inverting input of an ultra-low input bias current op-amp (JFET or CMOS input, e.g., OPA656 or ADA4817).
  • Feedback resistor Rf is tied between the op-amp output and the inverting input.
  • Feedback compensation capacitor Cf is tied in parallel with Rf to cancel the high-frequency pole caused by sensor junction capacitance.
  • Non-inverting terminal connects to clean analog ground or a precision low-noise reference bias.

1. Transimpedance Gain and Output Voltage Calculation

For each photodiode channel, the output voltage is given by the simple gain relationship:

Vout = -Ipd * Rf

Where:

  • Ipd = Photocurrent generated by the sensor under NIR illumination (Amperes)
  • Rf = Transimpedance feedback resistor value (Ohms)

If your maximum photodiode current is 250 uA and your target ADC driver headroom is 2.5 V, select:

Rf = 2.5 V / 250 uA = 10,000 Ohms (10 kOhm)

2. Feedback Capacitance (Cf) for Stability and Phase Margin

The total input capacitance Cin looking into the inverting terminal is the sum of all parallel capacitances:

Cin = Cj (Photodiode Junction Cap) + Ccm (Op-Amp Common Mode Cap) + Cdiff (Op-Amp Diff Cap) + Ctrace (PCB Parasitics)

Without a feedback capacitor Cf across Rf, the pole formed by Rf and Cin creates an uncompensated phase lag, causing ringing, overshoot, or outright oscillation in your position feedback. To achieve a maximally flat Butterworth response (45 to 60 degrees of phase margin), calculate Cf using the standard Texas Instruments Transimpedance Stability Formulation:

Cf = sqrt( Cin / ( 2 * pi * Rf * GBW ) )

Where GBW is the Gain-Bandwidth Product of your operational amplifier.

Let’s calculate real values for an actual high-speed galvanometer scanner closed loop feedback circuit:

  • Cin = 15 pF (Photodiode Cj + stray PCB capacitance)
  • Rf = 20 kOhm
  • Op-Amp = OPA656 (GBW = 230 MHz)

Step 1: Calculate Denominator: 2 * 3.14159 * 20000 * 230,000,000 = 2.8902e13
Step 2: Divide Cin by Denominator: 15e-12 / 2.8902e13 = 5.1899e-25
Step 3: Take Square Root: sqrt( 5.1899e-25 ) ≈ 0.72 pF

In practice, place a 0.8 pF to 1.0 pF ultra-stable C0G/NP0 ceramic capacitor across Rf. If you omit this, your scan head servo will likely buzz, develop limit-cycle oscillations, or experience high-frequency tracking jitter.

3. TIA Noise Floor and Johnson Noise

The feedback resistor generates thermal Johnson-Nyquist noise:

Vn_res = sqrt( 4 * kB * T * Rf * Delta_f )

Where:

  • kB = 1.380649e-23 J/K (Boltzmann’s constant)
  • T = Absolute temperature in Kelvin (e.g., 300 K)
  • Delta_f = Feedback circuit noise bandwidth

Keep Rf as small as practical while maintaining adequate signal-to-noise ratio (SNR) so that input voltage noise from the operational amplifier does not dominate when multiplied by the noise gain at high frequencies in your galvanometer scanner closed loop feedback front-end.


Signal Conditioning: The Ratiometric Sum-and-Difference Engine

Once you have converted channel A and channel B currents into voltages (Va and Vb), you must execute the differential and sum operations before digitizing.

Dual-Channel Processing Paths:
Difference Channel Output: Vdiff = (Va – Vb) -> Represents instantaneous angular shaft displacement.
Sum Channel Output: Vsum = (Va + Vb) -> Represents total received light flux for dynamic AGC or normalization.

In high-end analog galvo drivers, the sum channel is fed into an Automatic Gain Control (AGC) circuit or an analog divider IC. In modern DSP-driven digital servo controllers, both the difference and sum channels are digitized directly, or Va and Vb are sampled simultaneously using a multi-channel synchronous ADC, allowing the processor to perform the ratiometric normalization:

Normalized_Position = ( Va – Vb ) / ( Va + Vb )

This digital division completely immunizes your galvanometer scanner closed loop feedback against emitter thermal degradation over thousands of operational hours.


ADC Selection and Anti-Aliasing Filter Design

In modern digital galvo servo drivers, your PID loop update rate is typically between 100 kHz and 500 kHz. Any phase delay introduced by the ADC or its anti-aliasing filter directly eats into your loop’s phase margin.

Specification ParameterTraditional Analog Servo DriverModern Digital DSP Servo Controller
Position ResolutionContinuous (Thermal Noise Limited)16-bit to 18-bit True No-Missing-Codes
Feedback Loop Bandwidth2.5 kHz to 4.0 kHz3.5 kHz to 6.5 kHz
Drift CompensationManual Trimpots & NTC ThermistorsDynamic Polynomial Digital Look-Up Table
Notch Filter TuningFixed Twin-T / Sallen-Key Op-AmpsDynamic Multi-Notch Digital IIR Cascades
Commutation & CalibrationDual-Trace Scope & Pot TweakingSoftware GUI Step-Response Auto-Tuning
Noise SusceptibilityHigh (Long Analog Control Traces)Low (Direct Localized ADC Digitization)

1. Anti-Aliasing Filter (AAF)

Do not use high-order active filters with steep roll-offs (like a 4th-order Chebyshev) right before your ADC. While they attenuate out-of-band noise effectively, their severe group delay will ruin the phase margin of your galvanometer scanner closed loop feedback loop.

Instead, implement a balanced 2nd-order active Sallen-Key or Multiple-Feedback (MFB) Bessel filter, or even a simple 1st-order differential RC filter if your ADC sampling rate is sufficiently high (e.g., 2 MSPS SAR ADC oversampled).

The -3 dB cutoff frequency is typically set to 3 to 5 times the closed-loop servo bandwidth:

fc = 1 / ( 2 * pi * R * C * sqrt(2) )

For a 50 kHz anti-aliasing cutoff:

  • Select R = 499 Ohms (0.1% tolerance thin-film resistor)
  • Calculate C ≈ 4.5 nF (Use standard 4.7 nF C0G capacitor)

2. ADC Selection

Use a Successive Approximation Register (SAR) ADC with zero conversion latency, such as the AD4003 or ADS8881 (18-bit, 1.5 to 2 MSPS), rather than a Sigma-Delta converter. Sigma-Delta ADCs introduce digital decimation filter group delays (often tens of microseconds) that make tight galvo position loop closure nearly impossible.

According to research published in the IEEE Transactions on Industrial Electronics, minimizing converter conversion latency is far more critical to galvo settling time than pushing raw oversampling resolution past 20 bits.


The Digital PID + Feedforward Servo Loop Architecture

Now let’s examine the control algorithm executing inside your DSP or FPGA.

Digital Galvo Servo Loop Structure:

  • Input 1: Target Position Command R(k) from the trajectory generator.
  • Input 2: Actual Angular Feedback Y(k) from the optical sensor ADC.
  • Tracking Error Calculation: e(k) = R(k) – Y(k).
  • PID Processing: Proportional, Integral with Anti-Windup, and Band-Limited Derivative on Measurement.
  • Feedforward Addition: Velocity Feedforward (Kvff * V_cmd) + Acceleration Feedforward (Kaff * A_cmd).
  • Resonance Suppression: Cascaded 2nd-order IIR Notch Filters centered at mechanical resonance peaks.
  • Current Command Output: Scaled current demand sent to the DAC or PWM current-loop driver.

1. Discrete PID Implementation

At each sample interval Ts (e.g., 5 microseconds for a 200 kHz loop):

  1. Calculate Positional Tracking Error: e(k) = Target_Position(k) – Actual_Feedback(k)
  2. Proportional Term: P_out(k) = Kp * e(k)
  3. Integral Term with Anti-Windup: I_out(k) = I_out(k-1) + Ki * e(k) * Ts
    Clamp I_out to prevent integrator windup when large step commands saturate the coil drive amplifier.
  4. Derivative Term (Filtered Derivative on Feedback):
    Direct derivative on error amplifies optical sensor noise. Calculate velocity feedback directly from position feedback using a low-pass filtered differentiator: D_raw(k) = Kd * ( Feedback(k) – Feedback(k-1) ) / Ts
    D_filtered(k) = alpha * D_filtered(k-1) + (1 – alpha) * D_raw(k)

2. Adding Feedforward Control (Velocity and Acceleration)

A standard PID loop reacts only after an error occurs. Laser scan heads require high-speed vector tracking (e.g., vector marking at 5 m/s without corner rounding). To eliminate following error (tracking lag), add velocity feedforward (Kvff) and acceleration feedforward (Kaff):

Control_Output(k) = P_out(k) + I_out(k) – D_filtered(k) + ( Kvff * Velocity_Cmd(k) ) + ( Kaff * Acceleration_Cmd(k) )

Where:

  • Velocity_Cmd(k) is the first derivative of the trajectory setpoint.
  • Acceleration_Cmd(k) is the second derivative of the trajectory setpoint.

By implementing acceleration feedforward in your galvanometer scanner closed loop feedback, you supply the exact current needed to overcome rotor inertia before the tracking error even begins to form.

Si PIN photodiodes for Galvo PDC-2C3432-NIR-B

The PDC-2C3432-NIR-B is a specialized segmented PIN photodiode chip engineered for precise differential position feedback in high-speed galvanometer scanners. Integrating this dual-channel segmented PIN photodiode chip allows systems to obtain accurate angular tracking with minimal signal noise.


Suppressing Mechanical Resonance: Digital Notch Filters

Every galvanometer scanner has a torsional mechanical resonance dictated by rotor inertia, mirror mount stiffness, and coil shaft compliance. This mechanical resonance typically sits between 8 kHz and 22 kHz.

If your loop gain pushes energy into this resonance frequency, the scan head will emit an audible squeal, overheat the drive coil, and lose position lock.

Torsional Resonance Mechanics:
At the mechanical resonance frequency f_res, the open-loop phase drops by 180 degrees while amplitude spikes by 12 dB to 25 dB. If the feedback loop attempts to correct position errors near this frequency without attenuation, the system enters self-sustaining mechanical oscillation.

To stabilize your galvanometer scanner closed loop feedback, place one or two 2nd-order Infinite Impulse Response (IIR) Digital Notch Filters in series with your PID output:

H_notch(z) = ( b0 + b1z^-1 + b2z^-2 ) / ( 1 + a1z^-1 + a2z^-2 )

Design the notch filter with:

  • Center frequency (f0): Exactly matching the mechanical resonance measured via swept-sine frequency response analysis.
  • Quality Factor (Q): Between 4 and 10 to suppress the resonance peak without carving away too much phase margin around your 2 kHz to 4 kHz unity-gain crossover.

Driving the Coil: Current Mode Power Output Stage

Galvo rotors respond to torque, which is strictly proportional to current (Torque = Kt * I_coil), not voltage. Therefore, the output of your PID loop must control a high-speed transconductance (voltage-to-current) power amplifier.

Voice Coil Transconductance Driver Stages:

  • Input Command: Precision voltage command V_cmd from the PID loop DAC.
  • Power Operational Stage: High-current Class AB operational amplifier (or discrete push-pull bridge) sourcing up to 5 A to 10 A peak.
  • Current Sensing: Low-inductance shunt resistor (Rsense = 0.25 to 1.0 Ohm) placed in series with the galvo coil return path.
  • Inner Current Feedback: Inverting closed loop forcing V_sense across Rsense to strictly match V_cmd.

Circuit Rules for the Power Driver:

  1. Low Sense Resistance: Use a non-inductive current sense resistor (Rsense = 0.25 to 1.0 Ohm, 0.1% tolerance, 15 ppm/°C).
  2. Current Feedback Loop Speed: The inner current control loop should have a bandwidth at least 5 to 10 times higher than the outer position loop (typically 40 kHz to 100 kHz current loop bandwidth).
  3. Thermal Dissipation: Galvo coils run hot during continuous vector scanning. Ensure your power amplifier stage (whether using discrete MOSFET push-pull bridges or monolithic high-voltage op-amps like the OPA548 or LM675) has a robust thermal path away from the sensitive photodiode analog front end.

According to standard electromechanical servo design guides documented by the Wikipedia Galvanometer Engineering Overview, closing an ultra-fast inner current loop is essential to isolate the outer galvanometer scanner closed loop feedback from temperature-induced coil resistance changes.


Real-World Engineering Case: Eliminating Edge Jitter on a 20 kHz Scan Line

During a recent engineering review of a 3-axis galvo scan head used in wafer micromachining, the client reported intermittent 50 um ragged edges along high-speed raster scan lines.

Failure Diagnostics Summary:

  • Observed Symptom: Laser line edges showed periodic micro-scalloping at 100 kHz during high-acceleration raster sweeps.
  • Oscilloscope Inspection: A 150 mV switching spike appeared on the photodiode TIA inverting summing node, perfectly synchronized with the PWM coil drive chopping frequency.
  • Physical Root Cause: The TIA feedback traces for photodiode channels A and B ran across a split ground plane directly beneath the switching lines of the H-bridge coil driver. The resulting capacitive coupling injected switching ripple straight into the high-impedance inverting node of the TIA.

Troubleshooting and Resolution Path:

  1. Hardware Fix:
    • Rerouted the photodiode signals onto an internal shielded analog layer sandwiched between solid, unbroken analog ground planes (AGND).
    • Replaced discrete photodiode packages with the PDC-2C3432-NIR-B dual-segment PIN photodiode chip to ensure both optical channels shared identical thermal and capacitive symmetry.
    • Tuned the TIA feedback capacitor from an uncalculated 10 pF down to 1.2 pF, instantly raising front-end bandwidth from 12 kHz to 85 kHz.
  2. Algorithm Fix: Added a digital 2nd-order IIR notch filter centered at 14.2 kHz on the DSP to extinguish rotor mechanical resonance.
  3. The Result: Positional jitter dropped from 48 microradians down to under 2.2 microradians, completely smoothing out the laser raster edges.

This fix highlights how clean sensor physics and proper board layout are just as crucial as algorithmic tuning in any galvanometer scanner closed loop feedback design.


PCB Layout and Grounding Best Practices for Galvo Servo Boards

When laying out your galvo servo controller board, treat the board as three distinct physical zones:

Three-Zone PCB Partitioning Scheme:

  • Zone 1 (Analog Sensor Front-End): Houses the Silicon PIN photodiodes, low-noise TIAs, reference voltage sources, and balanced difference amplifiers. Connected strictly to clean AGND.
  • Zone 2 (Digital Processing Core): Houses the 32-bit DSP / FPGA, high-speed SAR ADCs, digital isolators, and clock oscillators. Connected to DGND.
  • Zone 3 (Power Drive Stage): Houses the H-bridge / linear power op-amps, power supply bulk capacitors, and current sense shunts. Connected to high-current PGND.

Layout Guidelines for Optimal Noise Rejection:

  • Keep TIA Inverting Traces Extremely Short: The trace connecting the photodiode anode/cathode to the op-amp inverting input is the most noise-sensitive trace on the board. Make it as short as humanly possible (less than 3 mm) and surround it with an AGND guard ring.
  • Physical Thermal Isolation: Keep power output stages and high-power shunt resistors at the physical opposite end of the PCB from the photodiodes and TIAs. Thermal gradients across discrete photodiode pairs cause angular position drift in your galvanometer scanner closed loop feedback.
  • Separate AGND and PGND: Never return high-current coil return paths through the analog sensor ground. Tie Analog Ground (AGND), Digital Ground (DGND), and Power Ground (PGND) together only at a single star point near the power supply input.
  • Sensor Cable Shielding: If the optical detector head connects via a flex cable to the driver board, ensure the photodiode signal conductors are individually interleaved with ground shield traces (e.g., GND – SignalA – GND – SignalB – GND).

Si PIN photodiodes for Galvo PDC-C2928-NIR-B

Optimize scanning with our 940nm PIN photodiode chip, PDC-C2928-NIR-B. This 940nm PIN photodiode chip ensures precise galvo position sensing and low noise.


Comparing Feedback Sensor Technologies

While optical position detectors using silicon PIN photodiodes dominate high-speed galvo scanners, understanding alternative technologies helps in choosing the right architecture for your galvanometer scanner closed loop feedback system.

Feature ParameterOptical PIN Photodiode (BeePhoton)Capacitive Position SensorMoving Magnet Inductive LVDT
Sensor BandwidthVery High (> 50 kHz)Moderate (10 kHz to 20 kHz)Low (< 2 kHz)
Angular ResolutionSub-microradian (< 1 urad)Sub-nanoradian (Extremely Fine)Microradian
Rotor Inertia PenaltyUltra-Low (Ultra-Lightweight Vane)Low to Medium (Metal Sensor Fins)High (Heavy Magnetic Core)
Primary Drift SourceThermal / Emitter AgingDielectric & Air Humidity VariationsTemperature / Magnetic Hysteresis
Vibration ImmunityHigh (Balanced Differential Die)Low (Sensitive to Plate Gap Flex)High
Typical Target ApplicationHigh-Speed Laser Marking & OCTMetrology & Confocal MicroscopyHeavy Industrial Beam Steering

For applications requiring step-and-settle times under 200 microseconds, optical feedback using balanced PIN photodiode chips remains the gold standard in performance and dynamic responsiveness.


Frequently Asked Questions (FAQ)

1. Why is 940 nm or 920 nm NIR preferred over visible light for galvo feedback sensors?

Near-infrared emitters (940 nm and 920 nm) match the peak spectral responsivity of standard silicon PIN photodiodes. Furthermore, NIR LEDs generate higher optical power with lower forward voltage drops and less thermal dissipation compared to visible LEDs, keeping the scan head interior cooler and reducing photodiode thermal drift in your galvanometer scanner closed loop feedback.

2. How do I measure the mechanical resonance frequency of my galvo scan head?

Send a low-amplitude swept-sine excitation signal (chirp from 100 Hz to 30 kHz) into your coil current driver while logging the position feedback signal from your ADC. Compute the Fast Fourier Transform (FFT) of the input-output transfer function. The prominent peak where feedback amplitude spikes and phase drops rapidly represents your rotor-mirror torsional resonance.

3. What causes sudden high-frequency squealing when closing the PID loop?

This is almost always caused by one of three issues in the feedback circuitry:
1. Insufficient feedback capacitance Cf in the TIA stage, causing the front-end amplifier to oscillate.
2. Excessive proportional gain (Kp) or derivative gain (Kd) exciting the mechanical resonance peak around 10 kHz to 18 kHz.
3. Reversed feedback polarity, converting your negative feedback loop into an unstable positive feedback oscillator.


Build High-Precision Closed-Loop Optical Drivers with BeePhoton

Achieving sub-microradian repeatability and microsecond step response in high-speed laser scan heads demands photodetectors with rock-solid consistency, near-zero dark current, and ultra-low capacitance.

BeePhoton supplies high-performance silicon PIN photodiode chips and segmented quadrant arrays engineered specifically for closed-loop optical position sensing. Explore our complete range of photodiode products or speak with our sensor integration engineers to dial in the optical feedback stage for your next-generation servo driver.


External References & Industry Standards

  1. Analog Devices Technical Library: Transimpedance Amplifier Design Handbook (AN-649)
  2. Texas Instruments Precision Control Guides: Compensating the Transimpedance Amplifier (SBOA122)
  3. National Institute of Standards and Technology (NIST): Optical Sensor Calibration and Photodetector Standards
  4. IEEE Transactions on Industrial Electronics: Resonance Suppression and Advanced Servo Control in Galvanometer Scanners
  5. Wikipedia: Galvanometer Scanner Operating Principles

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